【摘要】：隨著半導體技術與集成電路工藝的發展,數字硅陀螺在眾多領域扮演著越來越重要的角色。數字硅陀螺是機械陀螺利用MEMS微型化后得到的硅結構,可以用于敏感加速度。由于通常的加速度信號通常通過硅結構中的機械位移體現,因此,讀取該機械位移,并且將其轉化為數字電路可以處理的數字信號,成為了數字硅陀螺的接口電路的主要功能。目前,數字硅陀螺的接口電路的研究是研究所與高校的研究熱點,但是目前的數字硅陀螺往往存在著采樣率過高,功耗較大的缺點,因此,利用帶通調制器結構對數字硅陀螺信號進行處理,對于降低功耗,抑制噪聲方面具有著重要的意義。本課題首先分析了數字硅陀螺敏感加速度的原理,并且分析了sigma-delta調制器調制信號的基本原理,即過采樣調制器通過提高采樣頻率,降低帶內噪聲,提高信噪比。由于本課題需要實現帶通調制器的中心頻率可以調頻的功能,因此設計了可以通過改變關鍵參數,改變噪聲傳遞函數零點的帶通調制器。在對數字硅陀螺與帶通調制器進行數學行為級建模后,在Simulink環境中對工作在各個中心頻率的帶通調制器進行了仿真,實現了較高的性能。在Simulink環境仿真的基礎上,利用0.5um CMOS的工藝條件,對帶通調制器的各個模塊進行了設計,設計了運算放大器、量化器電路、相位補償電路、DAC電路、時鐘信號產生電路、基準電路以及諧振器電路,并對各個模塊進行了仿真,并且將關鍵的諧振器電路以開關電容電路的形式實現;總體的電路級仿真結果顯示,在4KHZ、6KHZ、8KHZ、10KHZ、12KHZ處都可以將噪底抑制在-120dB,有效位數達到10bit以上。
[Abstract]:With the development of semiconductor technology and integrated circuit technology, digital silicon gyroscope plays a more and more important role in many fields. Digital silicon gyroscope is a silicon structure obtained by using MEMS miniaturization, which can be used for sensitive acceleration. Because the usual acceleration signal is usually reflected by the mechanical displacement in the silicon structure, reading the mechanical displacement and converting it into a digital signal which can be processed by the digital circuit has become the main function of the interface circuit of the digital silicon gyroscope. At present, the research of interface circuit of digital silicon gyroscope is the research hotspot of research institute and university, but the current digital silicon gyroscope often has the shortcoming of high sampling rate and high power consumption. The signal processing of digital silicon gyroscope using band-pass modulator structure is of great significance in reducing power consumption and suppressing noise. In this paper, the principle of sensitive acceleration of digital silicon gyroscope is analyzed, and the basic principle of modulation signal of sigma-delta modulator is analyzed, that is, over-sampling modulator can reduce the in-band noise and improve the signal-to-noise ratio by increasing the sampling frequency. Because the central frequency of the band-pass modulator can be modulated by changing the key parameters and changing the zero point of the noise transfer function, a band-pass modulator is designed. After modeling digital silicon gyroscope and band-pass modulator in mathematical behavior level, the band-pass modulator working at each center frequency in Simulink environment is simulated, and the high performance is realized. Based on the simulation of Simulink environment, each module of band-pass modulator is designed by using the process conditions of 0.5um CMOS. The operational amplifier, quantizer circuit, phase compensation circuit, DAC circuit, clock signal generation circuit are designed. The reference circuit and the resonator circuit are simulated, and the key resonator circuit is realized in the form of switched capacitor circuit. The overall simulation results at the circuit level show that the noise base can be suppressed to -120 dB at 4KHZ / 6KHZ / 8KHZ / 10KHZ / 10KHZ / 12KHZ, and the effective bit number is above 10bit.
【學位授予單位】：哈爾濱工業大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN761

【參考文獻】

相關博士學位論文 前1條

1 劉云濤;電容式SIGMA-DELTA微加速度計接口ASIC芯片研究[D];哈爾濱工業大學;2010年

，

本文編號：2378059